Thin films of lanthanum titanate and lithium lanthanum titanate (LLT) accept been developed by diminutive band degradation (ALD). Studies on the advance of lanthanum titanates showed that the lanthanum degradation amount is bargain if the titanium oxide and lanthanum oxide processes are combined, arch to college titanium capacity in the films. The forerunner systems acclimated for degradation of lanthanum titanates were TiCl4 + baptize and La(thd)3 (thd = 2,2,6,6-tetramethyl-3,5-heptanedione) + ozone. Lithium was alien into the actual in adjustment to drop LLT by application lithium tert-butoxide (LiOtBu) and baptize as precursors. The deposited films were analyzed by time-of-flight adaptable backfire apprehension assay (TOF-ERDA), accessory ion accumulation spectrometry (SIMS), X-ray fluorescence (XRF), X-ray reflectivity (XRR) and X-ray diffraction (XRD). TOF-ERDA gave the blur agreement of Li0.32La0.30TiOz at assimilation conditions.
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